Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilization. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and design of MEMS gyroscope for the problem of angular velocity measurement and minimization of the cross coupling between two axes. Innovative adaptive sliding mode controllers for a MEMS z-axis gyroscope are presented. The angular velocity and all gyroscope parameters including coupling parameters are real-time determined. The indirect adaptive sliding mode controller, direct adaptive sliding mode controller with proportional and integral sliding surface and adaptive sliding mode observer are developed respectively. Moreover, adaptive sliding mode control for two-axial angular sensor is extended to triaxial angular sensors. It is shown that the proposed adaptive sliding mode control schemes offer several advantages such as real-time estimation and large robustness to parameter variations and external disturbance.

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