Atomic layer deposition

Atomic layer deposition

Jesse Russell Ronald Cohn

     

бумажная книга



ISBN: 978-5-5139-0259-1

High Quality Content by WIKIPEDIA articles! Atomic layer deposition (ALD) is a thin film deposition technique that is based on the sequential use of a gas phase chemical process. The majority of ALD reactions use two chemicals, typically called precursors. These precursors react with a surface one-at-a-time in a sequential manner. By exposing the precursors to the growth surface repeatedly, a thin film is deposited.