High Quality Content by WIKIPEDIA articles! Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems. Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate. Usually, silicon wafers are used as substrates for bulk micromachining, as they can be anisotropically wet etched, forming highly regular structures.

Данное издание не является оригинальным. Книга печатается по технологии принт-он-деманд после получения заказа.