Direct bonding

Direct bonding

Jesse Russell Ronald Cohn

     

бумажная книга



ISBN: 978-5-5149-7863-2

High Quality Content by WIKIPEDIA articles! Direct bonding describes a wafer bonding process without any additional intermediate layers. The bonding process is based on chemical bonds between two surfaces of any material possible meeting numerous requirements. These requirements are specified for the wafer surface as sufficiently clean, flat and smooth. Otherwise unbonded areas so called voids, i.e. interface bubbles, can occur.