Extreme ultraviolet lithography

Extreme ultraviolet lithography

Jesse Russell Ronald Cohn

     

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ISBN: 978-5-5110-3216-0

High Quality Content by WIKIPEDIA articles! Extreme ultraviolet lithography (also known as EUV or EUVL) is a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.

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