The integration and test phases that are part of the development and manufacturing of complex manufacturing systems are costly and time consuming. As time-to-market is becoming increasingly important, it is crucial to keep these phases as short as possible, while maintaining system quality. This is especially true for the time-to-market driven semiconductor industry and for companies providing manufacturing systems to this industry such as ASML, a provider of lithographic systems. This book describes three methods that can be used to reduce cost and time during these integration and test phases. These methods are: 1) a method to construct an optimal test plan with respect to time, cost and/or quality, 2) a method to construct an optimal integration plan with respect to time, cost and/or quality, and 3) a method to construct an optimal integration and test plan with respect to time, cost and/or quality. Furthermore, this book shows that optimal integration and test plans are often more efficient than manually created plans, which reduces the time-to-market of a complex system while maintaining the same final system quality.

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