ISBN: | 978-5-5139-5989-2 |
High Quality Content by WIKIPEDIA articles! MEMS (Microelectromechanical Systems) for in-situ mechanical characterization refers to microfabricated systems (lab-on-a-chip) used to measure the mechanical properties (Young’s modulus, Fracture Strength) of nanoscale specimens such as nanowires nanorodswhiskers , nanotubes and thin-films. They distinguish themselves from other methods of nanomechanical testing because the sensing and actuation mechanisms are embedded andor co-fabricated in the microsystem, providing — in the majority of cases— greater sensitivity and precision.