High Quality Content by WIKIPEDIA articles! Nanolithography refers to the fabrication of nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. Nanolithography is used during the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS).Nanolithography is that branch of nanotechnology,which deals with the study and application of fabrication of nanoscale structures like semiconductor circuits.As of 2007, nanolithography is a very active area of research in academia and in industry.

Данное издание не является оригинальным. Книга печатается по технологии принт-он-деманд после получения заказа.