Please note that the content of this book primarily consists of articles available from Wikipedia or other free sources online. Nanometrology is a subfield of metrology, concerned with the science of measurement at the nanoscale level. Nanometrology has a crucial role in order to produce nanomaterials and devices with a high degree of accuracy and reliability in nanomanufacturing. A challenge in this field is to develop or create new measurement techniques and standards to meet the needs of next-generation advanced manufacturing, which will rely on nanometer scale materials and technologies. The needs for measurement and characterization of new sample structures and characteristics far exceed the capabilities of current measurement science. Anticipated advances in emerging U.S. nanotechnology industries will require revolutionary metrology with higher resolution and accuracy than has previously been envisioned.

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