High Quality Content by WIKIPEDIA articles! Octadecyltrichlorosilane (OTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts violently with water, and is sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.