High Quality Content by WIKIPEDIA articles! Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is a compound of carbon and fluorine used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for Ozone depleting chlorofluorocarbon refrigerants.

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