Please note that the content of this book primarily consists of articles available from Wikipedia or other free sources online. Patterning by Etching at the nanoscale (PENs) is a soft lithographic technique in which the bonds in the PDMS matrix are broken to controlably etch PDMS (ie dissolve) at a slow rate along the outside of a PDMS channel formed with a patterned PDMS stamp applied to a surface. The channel in the stamp can be enlarged in the order of tens of nanometers to several micrometres. Exposing a fresh area of a surface that can be reacted with.PDMS contains polymer chains of silicon-oxygen bonds, these bonds can be broken by fluoride containing species, in the same way that silicon wafers are prepared by etching with hydrofluoric acid, ammonium fluoride and related compounds.

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