Nowadays the application of physical analytic methods in the materials science (synthesis, characterisation and development of new materials) is essential. In this work four of these techniques, which are able to investigate surfaces and interfaces as well as the bulk material: secondary ion mass spectrometry (SIMS), Rutherford backscattering (RBS), electron microscopy (SEM, TEM) and Auger electron spectroscopy (AES) are applied on four different research areas: powder metallurgy, Tribology on the aerospace bearing materials, Gettering effects and defect engineering in Si and SiGe heterostructures. Generally, the use of the physical analytic methods in materials science is essential. Here, it could be shown that due to their figures of merit, SIMS, AES, RBS and SEM / TEM are complementary methods each one with advantages but also with some drawbacks.

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