Plasma activated bonding

Plasma activated bonding

Jesse Russell Ronald Cohn

     

бумажная книга



ISBN: 978-5-5139-3339-7

High Quality Content by WIKIPEDIA articles! Plasma activated bonding is a derivative, directed to lower processing temperatures for direct bonding with hydrophilic surfaces. The main requirements for lowering temperatures of direct bonding are the use of materials melting at low temperatures and with different coefficients of thermal expansion (CTE).