This book presents award-winning research work on two novel rotary gate microvalves developed for flow modulation in microfluidic system. These are the first electromagnetically actuated rotary gate microvalves that provide some of the most desirable attributes such as high open flow capacity, mechanical bistability of the gate, non-contact and fast acting electromagnetic actuation, multiple fluidic ports,and high flow modulation. This work encompasses engineering design, microfabrication, and experimental evaluation of these microvalves in three distinct areas – micro compliant mechanism, microfluidics, and electromagnetic actuation at micro scale. A new class of micro compliant mechanism that can perform a purely in-plane rotational motion without the use of pin joints as in microgear trains is presented. And new techniques for high aspect ratio microfabrication and micro- device testing is explained.

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