ISBN: | 978-5-5088-6452-1 |
High Quality Content by WIKIPEDIA articles! Rutherford backscattering spectrometry (RBS) is an analytical technique used in materials science. Sometimes referred to as high-energy ion scattering (HEIS) spectrometry, RBS is used to determine the structure and composition of materials by measuring the backscattering of a beam of high energy ions impinging on a sample.