A variety of harsh-environment and high demanding applications are gaining emphasis in Micro Electro- Mechanical System (MEMS) recently, such as locations of high temperatures, high oxidizing/corrosive environments, strong vibrations, and high radiation. Limitations of Si-based micro-systems for these applications are obvious. Package size and cost also become substantial when the devices have to be sufficiently isolated from the environmental harshness. Thus, an enabling platform material has to be sought to meet requirements from both operation condition and cost reduction. Silicon Carbide (SiC) is exceptionally well suited for these applications, which has motivated author to pursue the development of this platform material for MEMS and, more particularly in this work, high temperature pressure sensors and IR emitters. This work provides details of research prototypes developed with end-application in mind, and is especially useful to engineering professionals in industry and researchers in academia in micro sensor fields, or any entrepreneur and venture capitalist who may be considering business opportunities in the target market addressed.

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